Challenges and Progress in Low Defectivity for advanced ArF Lithography Processes using Surface Localized Material Technology
نویسندگان
چکیده
منابع مشابه
Layout Design and Lithography Technology for Advanced Devices
OVERVIEW: The minimum feature size required for the most advanced semiconductor devices is now below half the exposure wavelength, and the optical lithography technology is facing its practical resolution limit. In this article, we review the current status of DFM and issues for further miniaturization. The role and requirements of metrology technology are also discussed. The layout design has ...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2017
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.30.367